Rigaku MFM310
X-ray Reflectivity (XRR)
Currently Configured for 300mm wafer size
EQUIPMENT DETAILS:
1. Automatic Wafer handling robot system with 200mm and 300mm wafer handling
capability and wafer pre-aligner.
2 . Two 300mm FOUP load ports with FOUP ID readers and control software.
3. X-ray generator and Cu COLORS beam module for XRR and XRF measurements.
4. X-ray generator and Mo COLORS beam module for XRF measurements.
5. Sample stage with vacuum chuck for 200mm and 300mm wafers.
Stage motion is computer controlled for axes X, Y, 0 and Z.
6. Highly accurate and precise goniometer with direct sensing optical encorder system
7. Control/and data processing system ccmsisting of:
- Control computer -with Windows XP, LCD monitor
- Measurement software for XRR and XRF
- Data processing software for XRR and XRF
8. Air cooling Chiller
9. Center chip for stage calibrartion
10. Isolated Stone Base for optic mechanism.
11. Cognex Pattern recognition
12. Anti-vabration structure
13. GEM 300 communication software (Rigaku standard specification)

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. Exapro recommends to check the details with the seller before a purchase

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status
Client type Reseller
Active since 2010
Offers online 49
Last activity May 30, 2023

Description

Rigaku MFM310
X-ray Reflectivity (XRR)
Currently Configured for 300mm wafer size
EQUIPMENT DETAILS:
1. Automatic Wafer handling robot system with 200mm and 300mm wafer handling
capability and wafer pre-aligner.
2 . Two 300mm FOUP load ports with FOUP ID readers and control software.
3. X-ray generator and Cu COLORS beam module for XRR and XRF measurements.
4. X-ray generator and Mo COLORS beam module for XRF measurements.
5. Sample stage with vacuum chuck for 200mm and 300mm wafers.
Stage motion is computer controlled for axes X, Y, 0 and Z.
6. Highly accurate and precise goniometer with direct sensing optical encorder system
7. Control/and data processing system ccmsisting of:
- Control computer -with Windows XP, LCD monitor
- Measurement software for XRR and XRF
- Data processing software for XRR and XRF
8. Air cooling Chiller
9. Center chip for stage calibrartion
10. Isolated Stone Base for optic mechanism.
11. Cognex Pattern recognition
12. Anti-vabration structure
13. GEM 300 communication software (Rigaku standard specification)

Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. Exapro recommends to check the details with the seller before a purchase


Specifications

-------------------
Worked hours
Hours under power
State good
At local norms ---------
Status

About this seller

Client type Reseller
Active since 2010
Offers online 49
Last activity May 30, 2023

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Rigaku MFM310 Wafer machine